Usually we are handling
Silicon monocrystalline, CZ and FZ, optical and mirror grade.
Silicon (Si) is grown by Czochralski pulling techniques
(CZ) and contains some oxygen that causes an absorption
band at 9 microns. To avoid this, material can be prepared
by a Float-Zone (FZ) process. Optical silicon is generally
lightly doped (5 to 40 ohm cm) for best transmission above
10 microns, and doping is usually boron (p-type) and phosphorus
(n-type). After doping silicon has a further pass band:
30 to 100 microns which is effective only in very high resistivity
uncompensated material.
CZ Silicon is commonly used as substrate material for infrared
reflectors and windows in the 1.5 - 8 micron region. The
strong absorption band at 9 microns makes it unsuitable
for CO2 laser transmission applications, but it is frequently
used for laser mirrors because of its high thermal conductivity
and low density. Application as window, lens in the 1.5
- 8 ¦Ìm region; Mirror for CO2 laser and spectrometer applications.
Si Mirror grade
Any dopant, any conductivity, any orientation, not warranted
with respect to transmission, suitable for mirror substrates.
Si Optical grade
CZ, P type doped with Boron, <111> or <100>,
Resistivity 5 - 40 ohmcm
FZ, N type doped with Phosphorus, <111>, Resistivity
> 50, preferably > 500 ohmcm, the absorption at 9
microns is absent.
Also we produced Silicon wafers according customers specifications,
these substrates can be used in the semiconductor production.
We can offer services like lapping, cutting, grinding, polishing,
double-side polishing.
Main Properties
| Crystal properties |
| Crystal Growth Method |
Czohralski (CZ) & Floatzone (FZ) |
| Max. Size (mm)
CZ
FZ |
<¦µ350mm
<¦µ125mm |
| Optical properties
|
| Transmission Range |
1.2~8um
|
| Reflection Loss, for two surfaces at 5 ¦Ìm |
46.2%
|
| Refractive Index |
See below
|
| Wavelength (um) |
Refractive Index (n) |
Wavelength (um) |
Refractive Index (n) |
1.357 |
/ |
5.500 |
3.4213 |
1.3951 |
3.4975 |
6.000 |
3.4202 |
1.6606 |
3.4929 |
6.500 |
3.4195 |
1.8131 |
3.4608 |
7.000
|
3.4189 |
2.1526 |
3.4476 |
7.500 |
3.4186 |
2.3254 |
3.443 |
8.000 |
3.4184 |
3.000
|
3.432
|
8.500 |
3.4182 |
3.500
|
3.4284
|
10.00 |
3.4179 |
4.000
|
3.4257
|
10.50 |
3.4178 |
| 4.500 |
3.4236 |
11.04 |
3.4176 |
5.000 |
3.4223 |
|
|
| Transmission Curve |
See below |
|
|
| Crystallographic properties |
| Syngony |
Cubic |
| Lattice Constant, A |
5.43 |
| Physical properties |
| Density |
2.33g/cm3 |
| Hardness, Mohs |
7 |
| Dielectric Constant for 9.37 x 109 Hz |
13 |
| Melting point, §à§³ |
1414 |
| Thermal Conductivity, W/m¡¤K at 313 K |
163 |
| Thermal Expansion, 1/K at 293 K |
2.6x10-6 |
| Specific Heat Capacity, J/(kg?¡ãC) |
712.8 |
| Bandgap, eV |
1.1 |
| Knoop Hardness, kg/mm2 |
1100 |
| Young's Modulus, Gpa |
130.91 |
| Shear Modulus, GPan |
79.92 |
| Bulk Modulus, GPa |
101.97 |
| Debye Temperature, K |
640 |
| Poisson's Ratio |
0.28 |
| Chemical properties |
| Solubility in water |
None |
| Molecular Weight |
28.09 |
General Specifications
| Optical grade Silicon Window Substrates |
| Parameters |
Commercial grade |
Precision grade |
| Substrate Material |
CZ or FZ optical Silicon mono
|
| Diameter Tolerance |
+0/-0.10mm
|
| Thickness Tolerance |
¡À0.10mm
|
| Clear Aperture |
>Central 90% of diameter
|
| Surface Quality |
60-40 S/D |
40-20 S/D |
| Parallelism |
3~5 arc min |
1 arc min |
| Surface Flatness |
1¦Ë per 25mm |
¦Ë/4 |
| Chamfer |
0.15~0.35mm¡Á45¡ã face width ¡Á 45¡ã¡À15¡ã
|
| Coating |
Coatings are available upon request
|
| Optical grade Silicon Lens Substrates |
| Parameters |
Commercial grade |
Precision grade |
Ultra-precision grade |
| Substrate Material |
CZ or FZ optical Silicon mono
|
| Diameter Tolerance |
+0/-0.10mm
|
| Thickness Tolerance |
¡À0.10mm
|
| Focal Length Tolerance |
<¡À1% |
| Clear Aperture |
>Central 90% of diameter
|
| Surface Quality |
60-40 S/D |
40-20 S/D |
20-10 S/D |
| Centration |
<3 arc min |
<1 arc min |
| Surface Flatness |
Power<3 fringes(1.5¦Ë)
Irregularity<0.5 fringes(¦Ë/4) |
Irregularity<0.2 fringes(¦Ë/10) |
| Chamfer |
0.15~0.35mm¡Á45¡ã face width ¡Á 45¡ã¡À15¡ã
|
| Coating |
Coatings are available upon request
|
No coating |
| Silicon Wafers |
| Parameters |
Value |
| Substrate Material |
CZ Silicon, N or P, R=0.003~50 ohm.cm |
| Orientation |
<100> / <111> |
| Diameter Tolerance |
3"~8"¡À0.2mm |
| Thickness Tolerance |
According to SEMI or customer¡¯s requirements
T¡À15um |
| Thickness Vary (TTV) |
<5um |
| Surface Flatness (TIR) |
<4um |
| Surface (STIR) |
<0.6um |
| Warp |
<30um |
Note:
Other special request upon your requirements!
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